JPH0724337Y2 - 基板搬送装置 - Google Patents

基板搬送装置

Info

Publication number
JPH0724337Y2
JPH0724337Y2 JP1989092324U JP9232489U JPH0724337Y2 JP H0724337 Y2 JPH0724337 Y2 JP H0724337Y2 JP 1989092324 U JP1989092324 U JP 1989092324U JP 9232489 U JP9232489 U JP 9232489U JP H0724337 Y2 JPH0724337 Y2 JP H0724337Y2
Authority
JP
Japan
Prior art keywords
substrate
pulleys
transmission means
pulley
traveling rack
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989092324U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0331146U (en]
Inventor
正美 大谷
靖 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1989092324U priority Critical patent/JPH0724337Y2/ja
Publication of JPH0331146U publication Critical patent/JPH0331146U/ja
Application granted granted Critical
Publication of JPH0724337Y2 publication Critical patent/JPH0724337Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Reciprocating Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
JP1989092324U 1989-08-04 1989-08-04 基板搬送装置 Expired - Lifetime JPH0724337Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989092324U JPH0724337Y2 (ja) 1989-08-04 1989-08-04 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989092324U JPH0724337Y2 (ja) 1989-08-04 1989-08-04 基板搬送装置

Publications (2)

Publication Number Publication Date
JPH0331146U JPH0331146U (en]) 1991-03-26
JPH0724337Y2 true JPH0724337Y2 (ja) 1995-06-05

Family

ID=31641761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989092324U Expired - Lifetime JPH0724337Y2 (ja) 1989-08-04 1989-08-04 基板搬送装置

Country Status (1)

Country Link
JP (1) JPH0724337Y2 (en])

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944576U (ja) * 1982-09-10 1984-03-24 日産自動車株式会社 コンベア装置
JPS6232051U (en]) * 1985-08-10 1987-02-25
JPS6293112A (ja) * 1985-10-18 1987-04-28 Kazuo Kimata 搬送装置

Also Published As

Publication number Publication date
JPH0331146U (en]) 1991-03-26

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